| 摘要 |
PROBLEM TO BE SOLVED: To check the related state of a macro-defect part and a micro-defect part by superposing a macro-inspection image and a micro-inspection image one upon another and to enhance the inspection efficiency of a glass substrate. SOLUTION: A macro-image having a plurality of macro-defect parts G1 -G8 and point display are displayed at the portion on a display screen corresponding to the coordinates (X, Y) of micro-defect parts S1 -Sn in micro-defect map data.
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