| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-speed warp measuring and deciding device, which is automatically started and stopped and has its measurement precision improved by an optical measuring instrument, and to provide its method. SOLUTION: The automated measuring and deciding device and measuring and deciding method for warp are equipped with a measurement chamber equipped with a surface plate as a measurement base, and a measuring means associated with a substrate sense making it start and end measurement on sensing a substrate being carried in and out on the surface plate and horizontally and vertically movable; and a decision part equipped with a display part for decision results regarding a standard article having a warp quantity within a set warp permissible range and other nonstandardized articles, and a warning display unit regarding the nonstandardized articles.
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