| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection device capable of highly accurately inspecting wiring patterns on a multitude of inspected substrates in a short time. SOLUTION: In this substrate inspection device 1, inspected substrates 11 are fixed at reference positions of each of four holders 13 provided at equal intervals on peripheral parts of a turntable 61, and the turn table 61 is turned in 90-degree increments to convey the holders 13 to a carry-in part 2, to a displacement detection part 3, to an inspection part 4, and to a carry-out part 5, these being disposed at equal intervals around the table. The carrying-in of the inspected substrates 11, the detection of displacement thereof from the reference positions, the inspection of the substrates, and the carrying-out of the substrates are continuously performed at the respective conveying positions. Since these handlings are simultaneously performed in parallel with each other at the carry-in part 2, at the detection part 3, at the inspection part 4, and at the carry-out part 5, a multitude of inspected substrates 11 are rapidly inspected with high accuracy.
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