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发明名称
DEVICE FOR CORRECTING THIRD-ORDER SPHERICAL ABERRATION IN A LENS, ESPECIALLY THE OBJECTIVE LENS OF AN ELECTRONIC MICROSCOPE
摘要
申请公布号
EP1057204(B1)
申请公布日期
2006.06.14
申请号
EP19980952539
申请日期
1998.08.29
申请人
CEOS CORRECTED ELECTRON OPTICAL SYSTEMS GMBH
发明人
HAIDER, MAXIMILIAN;UHLEMANN, STEPHAN
分类号
H01J37/153;G01Q30/06
主分类号
H01J37/153
代理机构
代理人
主权项
地址
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