| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscopic very small-shaped micro pump easy in manufacture, with high transport efficiency, and capable of transporting a large flow rate. SOLUTION: This micro pump comprises a first member 1 having a first electrode part 4 with at least a plurality of electrodes 5 concentrically formed, a second member 2 having a second electrode part 6 oppositely arranged to at least the first electrode part 4, a sealing part 3 having a suction port/delivery port 9 of fluid for maintaining and sealing the periphery between at least the oppositely arranged first member 1 and second member 2 in a predetermined clearance, and a delivery port/suction port 8 formed in any one of a central part surrounded by the first electrode part 4 of the first member 1 and a central part surrounded by the second electrode part 6 of the second member 2. In this case, a voltage signal is impressed between the first electrode part 4 and the second electrode part 6 opposed to its part, and the fluid is transported in a concentric shape by generating electrostatic force. COPYRIGHT: (C)2007,JPO&INPIT
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