FILM FORMING APPARATUS AND METHOD FOR MANUFACTURING LIGHT EMITTING ELEMENT

摘要

A film forming apparatus is provided with a processing container having a holding table for holding a substrate to be processed inside the container; a gas material generating section arranged outside the processing container, for generating a gas material by evaporating or sublimating a film forming material including a metal; a gas material supplying section for supplying the processing container with the gas material; and a transport path for transporting the gas material to the gas material supplying section from the gas material generating section. The film forming apparatus is characterized in that a layer including a metal is formed on an organic layer including a light emitting layer on the substrate to be processed.