| 摘要 |
PROBLEM TO BE SOLVED: To provide a joining method, by which the exfoliation at the adhesion interface between a silicon carbide seed crystal and a susceptor can be suppressed when a silicon carbide single crystal is produced and which is suitable for surely fixing the silicon carbide seed crystal to the susceptor. SOLUTION: A method for manufacturing the susceptor to which the silicon carbide seed crystal is fixed includes: a process for preparing the silicon carbide seed crystal, the susceptor for fixing the seed crystal and an adhesive for fixing the seed crystal to the susceptor; a process for applying the adhesive to the seed crystal and/or the susceptor in a discontinuous state where bubble channels are formed; and a process for joining the seed crystal and the susceptor with the adhesive. COPYRIGHT: (C)2008,JPO&INPIT
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