| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing apparatus capable of preventing light garbage and particles floated on a liquid surface and preventing re-deposition of the garbage or the like when a work after it is washed with a solvent in a washing tank is pulled up. SOLUTION: The washing tank 12 is provided with at least a liquid washing area 16 for washing the work 44 by the liquid of the stored detergent 46, an overflow tank 38 (liquid flowing out area) into which an excessive liquid of the detergent 46 in the liquid washing area 16 flows, and a first circulation route 71 for introducing the liquid to the liquid washing area 16 after it is discharged from any surface in the washing tank 12. In the liquid washing area 16, a liquid surface flowing means having a flowing-in member 72 for flowing-in the detergent 46 into the liquid washing area 16 through the first circulation route 71 and a liquid stream guide 81 for introducing the liquid stream of the detergent 46 flowing-in from the flowing-in member 72 to the liquid surface 73 such that it becomes the liquid stream 74 parallel to the liquid surface 73 of the detergent 46 in the liquid washing area 16. COPYRIGHT: (C)2008,JPO&INPIT
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