发明名称 |
HONEYCOMB-STRUCTURED ELECTROMAGNETIC RADIATION THERMAL DETECTOR |
摘要 |
<p>The detector has an absorbent membrane (1) fixed to a suspension on a front side of a substrate (2) using an insulating support with a set of alveolate structures. Each structure is disposed between the membrane and the substrate. The support has a set of arms (3) integrated with the membrane. Each structure has a number of thin layers separated by spacers (8), and disposed between corresponding arm and substrate.</p> |
申请公布号 |
EP1616159(B1) |
申请公布日期 |
2009.03.04 |
申请号 |
EP20040742523 |
申请日期 |
2004.04.16 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
YON, JEAN-JACQUES;OUVRIER-BUFFET, JEAN-LOUIS;ASTIER, ASTRID;VILAIN, MICHEL |
分类号 |
G01J5/10;B81B1/00;B81B3/00;G01J5/20 |
主分类号 |
G01J5/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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