| 发明名称 |
FILM THICKNESS SENSOR AND MANUFACTURING METHOD THEREOF |
| 摘要 |
Disclosed is a film thickness sensor, Mg film or Mg/MgO film is coated on a surface of the film thickness sensor, so that Mg material is easy to attach to the film thickness sensor, and then the waste of Mg material is prevented. |
| 申请公布号 |
US2016252347(A1) |
申请公布日期 |
2016.09.01 |
| 申请号 |
US201414769293 |
申请日期 |
2014.12.03 |
| 申请人 |
BOE Technology Group Co., Ltd. ;Ordos Yuansheng Optoelectronics Co., Ltd. |
发明人 |
XIAO Ang |
| 分类号 |
G01B21/08;C23C14/06;C23C14/24 |
主分类号 |
G01B21/08 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A film thickness sensor, wherein Mg film or Mg/MgO film is coated on a surface of the film thickness sensor. |
| 地址 |
Beijing CN |
