| 摘要 |
Disclosed are a precursor composition for forming a zirconium-containing film and a method for forming a zirconium-containing film by using the same, wherein the composition is characterized in that about 1 to 3 moles of a cycloaliphatic unsaturated compound represented by a particular chemical formula or an aromatic compound represented by a particular chemical formula: and about 1 to 3 moles of a cyclopentadienyl zirconium (IV)-based compound represented by a particular chemical formula are mixed. In the composition, the two constituent compounds are stable with each other and homogenously mixed with each other in a liquid state, without reacting with each other, and thus the composition behaves just like a single compound, and exhibits a high vapor pressure. The use of the composition of the present invention can obtain a zirconium-containing film, like high-quality zirconia, conveniently and economically. |
| 主权项 |
1. A precursor composition for forming a zirconium-containing film, comprising a mixture of about 1 to 3 moles of either a cycloaliphatic unsaturated compound represented by Formula 1 or an aromatic compound represented by Formula 2, and about 1 to 3 moles of a cyclopentadienyl zirconium (IV)-based compound represented by Formula 3: wherein, in Formula 1, R1 to R8 are the same as or differ from one another, and are each independently selected from a hydrogen atom, a C1 to C10 alkyl group, a C6 to C12 aryl group, and a C7 to C13 aralkyl group; in, in Formula 2, R′1 to R′6 are the same as or differ from one another, and are each independently selected from a hydrogen atom, a C1 to C10 alkyl group, a C6 to C12 aryl group, and a C7 to C13 aralkyl group; in Formula 3, R″1 to R″6 are the same as or differ from one another, and are each independently selected from a hydrogen atom, a C1 to 10 alkyl group, a C6 to 12 aryl group, and a C7 to C13 aralkyl group, wherein R″1 and R″2, R″3 and R″4, or R″5 and R″6 are linked to each other to form a C3 to C10 cyclic amine group together with a nitrogen atom linked thereto; and m and n are each independently an integer selected from 0 to 10. |
