| 摘要 |
An integrated detection structure (1) has a first inertial mass (2) and a second inertial mass (2'), each of which is elastically anchored to a substrate (20) and has a linear movement along a first horizontal axis (x), a first detection movement of rotation about a first axis of rotation (A, A') parallel to a second horizontal axis (y) and a second detection movement of translation along the second horizontal axis; driving electrodes (12, 12') cause linear movement of the inertial masses, in opposite directions of the first horizontal axis (x); a pair of flexural resonator elements (3a-3b, 3a'-3b') and a pair of torsional resonator elements (4a-4b, 4a'-4b') are elastically coupled to the inertial masses, the torsional resonator elements (4a-4b, 4a'-4b') having a resonant movement of rotation about a second axis of rotation (B, B') and a third axis of rotation (C, C'), parallel to one another and to the first axis of rotation. The respective first detection movement of said first inertial mass or second inertial mass occurs with different modalities, according to the presence of a first angular velocity (© r ; © z ) or of a first linear acceleration (a z ; a y ) to be detected, thus causing corresponding variations of resonance frequency of the resonator elements. |
