| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an electromechanical conversion element which allows for collective polarization at wafer level, with an electromechanical conversion element thus obtained exhibiting a stabilized amount of displacement for a predetermined drive voltage.SOLUTION: After laminating a first electrode, an electromechanical conversion film, and a second electrode, the electromechanical conversion film and second electrode are individualized. Furthermore, a first insulation protective film, third and fourth electrodes connected with the first and second electrode, and a second insulation protective film having a plurality of pads connected with the third and fourth electrodes, respectively, are formed on the first and second electrodes. An amount of charges of 1.0×10C or more is generated by corona discharge or glow discharge, and polarization is performed by injecting the charges thus generated via a pad. Out of the plurality of pads, total area of the pads connected with the fourth electrode/total area of the pads connected with the third electrode is 0.1 or more. |
