| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate holder capable of easily, rapidly and safely attaching/detaching a top ring. <P>SOLUTION: The substrate holder comprises a top ring 10 to hold a substrate and a supporting shaft 28 to transmit the rotational driving force from a driving mechanism to the top ring 10 via a transmission mechanism 40. The supporting shaft 28 is split into a tip side portion including the transmission mechanism, and a base end side portion communicated with the transmission mechanism. The tip side portion is attachable/detachable to/from the base end side portion. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
