| 摘要 |
PROBLEM TO BE SOLVED: To provide a member coated with a hard film such as a diamond like carbon (DLC) film, which has adequate adhesiveness to a base material made from titanium or a titanium alloy; and to provide a production method therefor. SOLUTION: This production method comprises the steps of: treating the surface of the base material 20 made from titanium or the titanium alloy to adjust the maximum surface roughness of the base material 20 into 3μm or less; and forming a nitrogen-containing chromium film on the base material 20 through a chromium film by sputtering a target 22 made from chromium in a vacuum treatment chamber 12 of a treating apparatus 10. When the DLC film is formed on the surface as the hard film afterwards, the DLC film is formed on the nitrogen-containing chromium film by sputtering a target 22 made from carbon. COPYRIGHT: (C)2007,JPO&INPIT
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