| 摘要 |
ÄPROBLEM TO BE SOLVEDÜ: To provide a silica glass crucible, wherein there are no problems of generating a sinking and buckling when said crucible is used for pulling up single crystal silicon at a high temperature. <??>ÄSOLUTIONÜ: The silica glass crucible used for pulling up the single crystal silicon, wherein at least an outer surface of a wall part of the crucible is covered with fine grooves having a length of less than 200 mu m, a width of less than 30 mu m and a depth of from more than 3 mu m to less than 30 mu m. Preferably, said fine groves formed by carrying out a sand-blast treatment and a hydrofluoric acid etching and exist on more than 10 % of the outer surface of the crucible, and a sliding frictional coefficient of the outer surface of the crucible to a carbon at 1500 degree C is more than 0.6. |
