| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that there is a need for facilitating inspection of patterned structures, including complex structures having a complex three-dimensional pattern.SOLUTION: A system and a method are presented for use in inspection of patterned structures. The system comprises: data input utility for receiving first type of data indicative of image data on at least a part of the patterned structure; and data processing and analyzing utility configured and operable for analyzing the image data, and determining a shape model for at least one feature of a pattern in the structure, and using the shape model for determining an optical model for a second type of data indicative of optical measurement on the patterned structure.SELECTED DRAWING: Figure 2A |
