| 摘要 |
PROBLEM TO BE SOLVED: To process a brittle material substrate and a resin layer constituting a laminated substrate, simultaneously in a high quality.SOLUTION: A processing method includes a first step and a second step. In the first step, a laminated substrate G comprising a glass substrate 11, and a resin layer 12 formed on the surface of the glass substrate 11 is prepared. In the second step, a laser beam having a prescribed wavelength is condensed onto the glass substrate 11 to irradiate the laminated substrate G, and thereby a laser beam irradiation part of the resin layer 12 is modified, to thereby lower brittle fracture strength more than that of its periphery, and simultaneously generates a crack on the glass substrate 11.SELECTED DRAWING: Figure 2 |
