发明名称 SYSTEMS AND METHODS FOR OPTICAL MEASUREMENTS USING MULTIPLE BEAM INTERFEROMETRIC SENSORS
摘要 The disclosed technology may include systems, methods, and apparatus for optical measurements. A method is provided that includes receiving, by first and second Extrinsic Fabry-Perot Interferometer (EFPI) sensors, respective portions of interrogation light. The first EFPI sensor is responsive to a measurement stimulus and both the first EFPI sensor and the second EFPI sensor are responsive to a common mode stimulus. The method includes detecting a measurement signal and a first common-mode signal responsive to receiving altered interrogation light from the first EFPI sensor, the measurement signal corresponding to the measurement stimulus. The method includes detecting a second common mode signal responsive to receiving altered light from the second EFPI sensor. The method includes producing a measurement output signal, the measurement output signal representing a difference between the second common mode signal and a combination of the measurement signal and the first common-mode signal, and outputting the measurement output signal.
申请公布号 US2016327414(A1) 申请公布日期 2016.11.10
申请号 US201514705585 申请日期 2015.05.06
申请人 KULITE SEMICONDUCTOR PRODUCTS, INC. 发明人 Sanzari Martin A.
分类号 G01D5/353 主分类号 G01D5/353
代理机构 代理人
主权项 1. A method comprising: receiving, by a first Extrinsic Fabry-Perot Interferometer (EFPI) sensor, a first portion of interrogation light, wherein the first EFPI sensor is configured to alter the received first portion of the interrogation light responsive to a measurement stimulus; receiving, by a second EFPI sensor, a second portion of the interrogation light, wherein the second EFPI sensor is configured to be at least partially isolated from the measurement stimulus, and wherein the first EFPI sensor and the second EFPI sensor are both configured to alter the respective first and second portions of the interrogation light responsive to a common mode stimulus; detecting, by a first optical detector, a measurement signal and a first common-mode signal responsive to receiving altered interrogation light from the first EFPI sensor, the measurement signal corresponding to the measurement stimulus; detecting, by a second optical detector, a second common mode signal responsive to receiving altered light from the second EFPI sensor; producing a measurement output signal, the measurement output signal representing a difference between the second common mode signal and a combination of the measurement signal and the first common-mode signal; and outputting the measurement output signal.
地址 Leonia NJ US