APPARATUS AND METHOD FOR CONTROLLED CANTILEVER MOTION THROUGH TORSIONAL BEAMS AND A COUNTERWEIGHT

摘要

An optical micro-electromechanical device (20) having a substrate (23) and a mirror assembly suspended above the substrate. The mirror assembly includes a torsional beam (24) and a cantilever (26). The cantilever includes a first end (28) attached to the torsional beam and a second end (30) for supporting a mirror head (32). A connector (34) is attached to the torsional beam and a counterweight (36) is attached to the connector.