发明名称 |
Measuring device for the measurement of optical properties of coated substrates |
摘要 |
A measuring device includes several sequentially disposed coating chambers for measuring optical properties of coated substrates. These coating chambers are separated from one another by partitioning walls, whose free ends are located closely above the substrate. The substrate is preferably a continuous film. By measuring the reflection, the transmission, etc. of the substrate between the individual coating chambers, it becomes possible to carry out measurements within only partially completed layer systems. This yields advantages for the technical operation control of the coating process.
|
申请公布号 |
US2006192964(A1) |
申请公布日期 |
2006.08.31 |
申请号 |
US20040996808 |
申请日期 |
2004.11.24 |
申请人 |
LOTZ HANS-GEORG;SAUER PETER;HEIN STEFAN;SKUK PETER |
发明人 |
LOTZ HANS-GEORG;SAUER PETER;HEIN STEFAN;SKUK PETER |
分类号 |
G01N21/47;G01N21/84;C23C14/54;C23C14/56;G01N21/00;G01N21/55;G01N21/86 |
主分类号 |
G01N21/47 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|