| 摘要 |
The invention relates to a fluid discharging device for separately discharging at least two fluids comprising an inner nozzle for discharging a first fluid and a coaxially arranged outer nozzle for discharging a second fluid. Such a fluid can be liquid or gas or a mixture thereof. Mixtures of liquid or gas comprise fluids having gas as the continuous phase and liquid as the disperse phase (e.g. aerosols) and fluids having liquid as the continuous phase and gas as the disperse phase (e.g. carbonated water). The invention further relates to a device and a method for wet treating a flat disc-like substrate, such as semiconductor wafers, flat panel displays or compact discs utilizing such a fluid discharging device. If in the following the term wafer is used, such disk-like substrates are meant.
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