FLEXURAL PIVOT FOR MICRO-SENSORS

摘要

A micro-sensor is provided with a fixed reference frame and an elastic pivot. The elastic pivot has at least two co-axial segments of pivot and is coupled to the fixed reference frame. The elastic pivot has a neutral axis that is a central line of the pivot. A moveable body is coupled to the elastic pivot and the reference frame. The moveable body and the reference frame share a reference surface. The moveable body extends between the two co-axial segments to provide that for a rotation of the moveable body about the pivot the moveable body approaches the reference surface at a first side, and recedes from the reference surface from an opposite side to provide an opening gap and a closing gap. The neutral axis is below the reference surface. At least a first gauge is configured to detect tilt about the elastic pivot and measure separation of the moveable body and the reference frame at the reference surface. The gauge provides a measurement of the opening and closing of the opening and closing gaps. Inputs to be measured cause the moveable body to rotate about the pivot and strain the gauge.