| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern forming method that enables highly accurate processing.SOLUTION: A pattern forming method for forming a pattern for an electronic device on a surface to be processed of a long sheet substrate having flexibility while transporting the sheet substrate in a long-length direction includes the steps of: while supporting the sheet substrate by guide members at two positions separated from each other in the long-length direction by a distance L, applying a long-length direction tension to a portion of the sheet substrate corresponding to the distance L to form, between the two positions of the sheet substrate, a stable region, in which a dimension in the short-length direction orthogonal to the long-length direction becomes substantially constant after being shrunk at a predetermined degree, to have a predetermined width in the long-length direction; and forming a pattern for an electronic device on a flat portion of the surface to be processed corresponding to the stable region of the sheet substrate.SELECTED DRAWING: Figure 2 |
