发明名称 |
Gallium nitride substrate and gallium nitride film deposition method |
摘要 |
<p>Affords high-carrier-concentration, low-cracking-incidence gallium nitride substrates and methods of forming gallium nitride films. A gallium nitride film 52 in which the carrier concentration is 1 × 10 17 cm -3 or more is created. Initially, a gallium nitride layer 51 including an n -type dopant is formed onto a substrate 50. Then, the gallium nitride layer 51 formed on the substrate 50 is heated to form a gallium nitride film 52.</p> |
申请公布号 |
EP2019155(A2) |
申请公布日期 |
2009.01.28 |
申请号 |
EP20080008309 |
申请日期 |
2008.04.30 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
NAKAHATA, SEIJI |
分类号 |
C30B25/02;C30B29/40;H01L21/02 |
主分类号 |
C30B25/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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