发明名称 SENSOR, SUBSTRATE FOR THE SAME, AND MANUFACTURING METHOD FOR THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a sensor such that positioning of a generation section and a detector is easier and manufacturing is easier.SOLUTION: A sensor includes: a generation section for generating a predetermined detection object; a detector for detecting the detection object generated by the generation section; and a substrate 50 on which the generation section and the detector are provided. The substrate 50 includes: a first section 51 in which the generation section is provided; a second section 52 in which the detector is provided; a flexure sections 55a and 55b that bend between the first section 51 and the second section 52 so that the generation section and the detector oppose; and a ground pattern 80 provided in a region including the first section 51, the second section 52, and flexure sections 55a and 55b. With the ground pattern 80, ground patterns 81 and 82 owned by the flexure sections 55a and 55b is thinner than the ground pattern owned by the first section 51 and the second section 52.SELECTED DRAWING: Figure 9
申请公布号 JP2016114420(A) 申请公布日期 2016.06.23
申请号 JP20140252132 申请日期 2014.12.12
申请人 NSK LTD 发明人 YANAGISAWA TOMOYUKI;KUBOKAWA MINORU;OGUCHI TOSHIAKI;FURUKAWA HIDEKI;KAWAI YASUHIRO
分类号 G01D5/245;G01D5/347 主分类号 G01D5/245
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