发明名称 |
INHOMOGENEOUS TRANSMISSION LINE FOR DETERMINING THE PERMITTIVITY OF A DEVICE UNDER TEST IN A POSITION-RESOLVED MANNER |
摘要 |
Measuring carrier and measuring apparatus for spatially resolved metrological determination of a measurement variable dependent on the dielectric permittivity of a device under test to be applied to the measuring carrier. The measuring carrier has a supporting means with a measuring supporting surface, to which the device under test can be applied, and a measuring transmission line which entirely or partially forms the measuring supporting surface and is designed as an electrical series circuit of a multiplicity of transmission line cells for the purpose of transmitting an electromagnetic radio-frequency measurement signal which can be injected at the input port. The measuring supporting surface is structured in a cellular manner, wherein each of the transmission line cells of the measuring transmission line per se has a cell-individual propagation constant with respect to the radio-frequency measurement signal in a state free of a device under test, which propagation constant differs from the respective cell-individual propagation constants of the other transmission line cells, and is designed to assume a cell-individual propagation constant which differs from the state free of a device under test in a measuring state when the device under test lies on the transmission line cell. |
申请公布号 |
WO2016124489(A1) |
申请公布日期 |
2016.08.11 |
申请号 |
WO2016EP51887 |
申请日期 |
2016.01.29 |
申请人 |
IHP GMBH - INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS / LEIBNIZ-INSTITUT FÜR INNOVATIVE MIKROELEKTRONIK |
发明人 |
MELIANI, CHAFIK;GUHA, SUBHAJIT;FARABI, IBNE, JAMAL |
分类号 |
G01N27/22;G01N22/00;G01N33/487 |
主分类号 |
G01N27/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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