| 摘要 |
PROBLEM TO BE SOLVED: To provide a particulate generator capable, even in a case where a mixed gas is used as a plasma gas, of stabilizing the plasma while sustaining a high evaporation yield of a matrix portion.SOLUTION: A particulate generator 101 of the present invention possesses a plasma voltage detector D1 for detecting the voltage of a plasma generated between a DC plasma torch 50 and a matrix segment 85. The particulates generator 101, furthermore, possesses a plasma gas supply control unit C1 for controlling plasma gas supply units 63 and 64 on the basis of detection results transmitted from the plasma voltage detector D1 so as to vary, while supplying an inert gas, reaction gases supplied therefrom. |
