| 摘要 |
The invention relates to a calibration standard, especially for the calibration of devices for the non-destructive measurement of the thickness of thin layers, with a carrier layer ( 12 ) consisting of a basic material and a standard ( 17 ) applied on the carrier layer ( 12 ), said standard having the thickness of the layer to be measured at which the device is to be calibrated, with the carrier layer ( 12 ) comprising a plane-parallel measuring surface ( 16 ) to its bearing surface ( 14 ), that the standard ( 17 ) comprises a bearing surface ( 18 ) plane-parallel with its measuring surface ( 19 ) for bearing on the measuring surface ( 16 ) of the carrier layer ( 12 ), and that the standard ( 17 ) is permanently provided on the carrier layer ( 12 ) by means of plating by rubbing.
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