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发明名称
Plattierungsverfahren zum Füllen von Kontaktlöchern
摘要
申请公布号
DE60126853(T2)
申请公布日期
2007.08.30
申请号
DE2001626853T
申请日期
2001.01.31
申请人
SHINKO ELECTRIC INDUSTRIES CO. LTD.
发明人
NAKAMURA, KENJI;NAKAZAWA, MASAO
分类号
H01L21/28;H05K3/42;C25D5/16;C25D5/18;C25D5/34;C25D7/12;H05K3/18;H05K3/40;H05K3/46
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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