发明名称 |
COATING SOLUTION FOR FORMING TRANSPARENT DIELECTRIC THIN FILM FOR LOW-TEMPERATURE PROCESS AND TRANSPARENT INORGANIC THIN FILM TRANSISTOR HAVING THE THIN FILM FORMED BY THE COATING SOLUTION |
摘要 |
<p>Provided is a coating solution for forming a transparent dielectric thin film. The coating solution comprises: a first material including aluminum; a second material including zirconium; and a solvent which dissolves the first and second materials. The solvent includes first and second solvents.</p> |
申请公布号 |
KR20140059435(A) |
申请公布日期 |
2014.05.16 |
申请号 |
KR20120125890 |
申请日期 |
2012.11.08 |
申请人 |
INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY |
发明人 |
MOON, JOO HO;YANG, WOO SEOK;SONG, KEUN KYU;JUNG, YANG HO |
分类号 |
C09D1/00;C23C26/00;H01L21/18;H01L29/786 |
主分类号 |
C09D1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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