发明名称 COATING SOLUTION FOR FORMING TRANSPARENT DIELECTRIC THIN FILM FOR LOW-TEMPERATURE PROCESS AND TRANSPARENT INORGANIC THIN FILM TRANSISTOR HAVING THE THIN FILM FORMED BY THE COATING SOLUTION
摘要 <p>Provided is a coating solution for forming a transparent dielectric thin film. The coating solution comprises: a first material including aluminum; a second material including zirconium; and a solvent which dissolves the first and second materials. The solvent includes first and second solvents.</p>
申请公布号 KR20140059435(A) 申请公布日期 2014.05.16
申请号 KR20120125890 申请日期 2012.11.08
申请人 INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY 发明人 MOON, JOO HO;YANG, WOO SEOK;SONG, KEUN KYU;JUNG, YANG HO
分类号 C09D1/00;C23C26/00;H01L21/18;H01L29/786 主分类号 C09D1/00
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