| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that, in a charged particle beam microscope applying a phase retrieval method, a restructured image size to be restructured by phase retrieval and a sample area size contained in a diffraction image used do not conform by observation condition and it takes time for calculation. SOLUTION: In the electron microscope applying a phase retrieval method, an image size decided by a pixel size p of a diffraction image, a camera length L, and a wavelengthλof irradiation beams and a sample irradiation area are set to have a constant relation. Further, a beam irradiation area or a deflector scanning area at magnified image observation is set up by an irradiation adjustment mechanism 201 so that an image size in using the magnified image in the phase retrieval method is in constant relation with an image size decided by a pixel size of the diffraction image, a camera length, and a wavelength of the irradiation beams. With this, the diffraction image and an actual image restructured nearly conform to each other. Moreover, by carrying out the phase retrieval with the use of the magnified image having a size in the constant relation with the image size decided by Fourier transformation with the diffraction image, focusing of calculation is quickened to have accuracy improved. COPYRIGHT: (C)2009,JPO&INPIT
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