| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump which suitably improves finish workability of a heated part, heating efficiency, assembling operation efficiency, etc., when employing heating means as means of reducing deposits due to solidification of a gas in the vacuum pump by heating.SOLUTION: A vacuum pump P which discharges a gas by the rotation of a rotor 6 in a pump exterior case 1 has heating means 17 as means of reducing deposits due to solidification of a gas in the pump exterior case 1 by heating, and the heating means 17 is installed in a tubular member 18 through a linear heater 19 while the tubular member 18 is embedded in a heated part (pump base 1B). |
