发明名称 |
A THREE AXIS CAPACITIVE MEMS ACCELEROMETER ON A SINGLE SUBSTRATE |
摘要 |
The invention relates to a three axis capacitive mems accelerometer on a single substrate. In this invention a varying gap differential capacitive sensing three-axis accelerometer using SOI on glass process is introduced. The out of plane axis accelerometer which is developed in the present invention can be used for fabrication of either a three axis accelerometer with a single proof mass or an individual single axis accelerometers on the same substrate. Additionally the out of plane axis accelerometer which is developed in the present invention, the handle layer of the SOI wafer is used as packaging layer. |
申请公布号 |
WO2016108770(A1) |
申请公布日期 |
2016.07.07 |
申请号 |
WO2014TR00531 |
申请日期 |
2014.12.31 |
申请人 |
AYDEMIR, AKIN;AKIN, TAYFUN |
发明人 |
AYDEMIR, AKIN;AKIN, TAYFUN |
分类号 |
G01P15/08;B81B5/00;B81B7/00;B81C1/00;G01P15/125;G01P15/18 |
主分类号 |
G01P15/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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