| 摘要 |
This charged particle beam device is provided with: a primary charged particle beam source (101) that emits a primary charged particle beam (102); a deflector (117) for performing scanning with the primary charged particle beam; an objective lens (104) that converges the primary charged particle beam on a sample; a sample table (107) on which the sample (106) is placed; a detector (109) that detects signal charged particles emitted from the sample; and a diaphragm (105) having at least one opening for passing the primary charged particle beam and the signal charged particles. The diaphragm is configured such that the diaphragm is positioned between the objective lens and the sample table, and the shape of the opening and/or the height of the diaphragm can be changed corresponding to the detection angle range of the signal charged particles. Consequently, the charged particle beam device achieving both high spatial resolution, and selective detection of the signal charged particles, especially low-energy secondary electrons (108), at high angular resolution is provided. |
