| 发明名称 |
DEPOSITION DEVICE AND DEPOSITION METHOD |
| 摘要 |
When viewed in a plan view, a magnetic plate (10) has a first magnetic section (11) and a second magnetic section (12), and a magnetic section boundary (14) is slanted with respect to opening sides (26) and bent or curved so that magnetic fields exist along a plurality of mutually different directions. |
| 申请公布号 |
WO2016125648(A1) |
申请公布日期 |
2016.08.11 |
| 申请号 |
WO2016JP52283 |
申请日期 |
2016.01.27 |
| 申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
KOBAYASHI, YUHKI;KAWATO, SHINICHI;NIBOSHI, MANABU;TAKIZAWA, KAZUO |
| 分类号 |
C23C14/24;H01L51/50;H05B33/10;H05B33/14 |
主分类号 |
C23C14/24 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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