| 摘要 |
PROBLEM TO BE SOLVED: To provide methods, devices, systems and computer programs for predicting the remaining lifetime of a consumable part in semiconductor manufacturing equipment.SOLUTION: A consumable part, for use inside a chamber where plasma is used to process a semiconductor substrate, includes a body and a trigger feature. The trigger feature includes a capping element 202a, 202b, and a void 204 in the consumable part (e.g., edge ring 106) covered by the capping element. The void 204 is configured to become visible when the surface is eroded from exposure to the plasma over time. The void 204 becoming visible is an identifiable feature on the surface of the body that indicates a wear level for the consumable part, the wear level being associated with an amount of processing time remaining for the consumable part.SELECTED DRAWING: Figure 3A |
