| 摘要 |
PROBLEM TO BE SOLVED: To eliminate or reduce a projected part near the outer periphery of a substrate surface generated when a spacer layer is formed in a Blu-ray disk. SOLUTION: A UV-curing resin layer is spin-coated on a substrate surface and in this state, a projected part generating region of a substrate outer periphery is masked and the temporary curing of the resin layer by irradiation with UV light is performed, and after that, the resin in a state of non-temporary curing is shaken off by increasing the rotational speed of the substrate. COPYRIGHT: (C)2007,JPO&INPIT
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