| 摘要 |
<p>A pellicle adhering apparatus is provided to correct an interval between a stepper align key and a pellicle in real time by continuously aligning the stepper align key, until the pellicle is adhered on a photomask. A vision camera(30) is provided in a pellicle door arm(14), and is positioned at a rear of a pellicle door holder(24) to face a photomask(28). A position of the vision camera is stationary, and the vision camera is enclosed by a transparent cover(32). The vision camera continuously scans position information on a stepper align key formed on the photomask to output it to a controller, while a back door arm(12) and the pellicle door arm are moved towards a photomask holder(16).</p> |
