Plate Member, Substrate Holding Device, Exposure Apparatus and Method, and Device Manufacturing Method

摘要

A substrate holder PH includes a first holder PH 1 which holds a substrate P, a liquid-repellent inner surface Tc of a plate member T which faces a side surface Pc of the substrate P held on the first holder PH 1 via a predetermined gap A, and a chamfered portion C provided on an upper portion of the inner surface Tc. On the side surface Pc of the substrate P, a liquid-repellent area is provided, and the chamfered portion C is provided so as to face the liquid-repellent area of the substrate P held on the first holder PH 1 . Thereby, a substrate holding device which can restrain inflow of the liquid into the back surface side of the substrate is provided.