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发明名称
Trennmodul
摘要
申请公布号
DE60221447(T2)
申请公布日期
2008.04.24
申请号
DE20026021447T
申请日期
2002.09.13
申请人
ENTEGRIS INC.
发明人
NIERMEYER, KARL J.;LAVERDIERE, MARC;STANKOWSKI, RALPH J.;SMITH, JOSEPH E.
分类号
B01D35/30
主分类号
B01D35/30
代理机构
代理人
主权项
地址
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