PROBE, PROBE APPARATUS FOR SIGNAL DETECTION, PROBE APPARATUS FOR SIGNAL SUPPLY, AND INSPECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a probe capable of improving inspection accuracy in inspecting conductor patterns. SOLUTION: The probe is provided with an electrode 21 for detection and shield electrodes 23. With the supply of signals Se for inspection, the electrode 21 for detection detects current signals Si flowing via capacitance C0 with a conductor pattern 102 of a flexible substrate 100 supplied with the signals Se for inspection when the electrode 21 for detection is in a state close to the conductor pattern 102. The shield electrodes 23 are installed with insulators 22 interposed therebetween in the periphery of the electrode 21 for detection. A tip 25 of the electrode 21 for detection is constituted so as to be retracted to the side of a base end part 26 from tips 27 of the shields electrodes 23. COPYRIGHT: (C)2009,JPO&INPIT