| 摘要 |
PROBLEM TO BE SOLVED: To change a phase at relatively low transfer speed. SOLUTION: A phase changing device has a lens 12 emitting a laser spot from a laser element 10 generating laser beams, and XY stages 17, 18 mounting an object to be phase-changed and moving it in a two-dimensional direction on a surface vertical to a laser spot irradiation direction. In a focusing process, the object to be phase-changed in the laser spot is focused by laser power that does not reach a temperature region for crystallizing a phase change material. In a melting process after the focusing process, the object to be phase-changed in the laser spot is melted by laser power reaching a temperature region in which the phase change material is made amorphous, thus making the phase change material amorphous. The laser power of the temperature region that reaches a temperature region for crystallizing the phase change material and not forming an amorphous material, is used to focus and crystallize the object to be phase-changed in the laser spot, thus crystallizing the phase change material. COPYRIGHT: (C)2009,JPO&INPIT
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