| 摘要 |
PROBLEM TO BE SOLVED: To solve the following problems: a higher rotation speed is necessary for a polygon mirror or a galvano mirror which is used as a deflector which scans a light beam in an optical scanner in order to achieve higher resolution and higher speed printing, wherein the durability of bearings and heat generation and noise due to windage are troublesome, thus high speed scanning is limited; meanwhile, a method is suggested by which an oscillation mirror and a torsion beam which pivotally supports the mirror are integrally formed on a Si substrate, and the oscillation mirror has various advantages, however a flat forming of the mirror face is difficult, therefore the beam spot diameter on an image face varies based on the height of the image. SOLUTION: Even when the face shape of the oscillation mirror does not have a desired accuracy, the optical power generated by the face accuracy is offset by the power variation in the optical power due to the face deformation during the driving of the oscillation mirror by adjusting the incident position of the light beam, thus the beam spot diameter is kept constant regardless of the height of the image, and an excellent quality image formation is performed. COPYRIGHT: (C)2009,JPO&INPIT
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