THERMOELECTRIC TRANSDUCER

摘要

PROBLEM TO BE SOLVED: To achieve a thermoelectric transducer with a large power factor.SOLUTION: The thermoelectric transducer includes a semiconductor lamination thin film 10 having a SiGe layer 2 and a Si layer 3, being in contact with the SiGe layer 2. A composition ratio of the SiGe layer 2 based on an atomic ratio of Si and Ge is within a range of 85:15 to 63:37. The lamination thin film 10 includes a plurality of lamination structures 4 of the SiGe layers 2 and the Si layers 3.SELECTED DRAWING: Figure 1