DLP base small spot investigation system

摘要

Computer driven systems and methods involving at least one electromagnetic beam focuser and digital light processor that in combination serve to position selected wavelengths in a spectroscopic electromagnetic beam onto a small spot on a sample, and direct the one or more selected wavelengths reflected by the sample into, while diverting other wavelengths away from, a detector.

主权项

1. A system sequentially comprising:
a source (S) of a spectroscopic beam of electromagnetism; a first focuser (F1); a stage (STG) for supporting a sample; provision for mounting a second focuser (F2); a disperser (DISP); a digital light processor (DLP); a third focuser (F3); and a detector (DET); said system further comprising a computer (CMP) system for controlling the position of said first focuser (F1), and for operating said digital light processor (DLP) in synchrony therewith; such that in use a spectroscopic beam of electromagnetic radiation is provided by said source (S) thereof and directed to pass through said first focuser (F1), interact with a small spot on a sample (SS) placed on said stage (STG) for supporting a sample (SS), reflect therefrom and then become dispersed by interaction with said disperser (DISP) before being directed onto said digital light processor (DLP); and such that in use said computer (CMP) system causes said first focuser (F1), to be positioned at a known distance from said small spot on said sample (SS) so that at least one wavelength in said spectroscopic beam of electromagnetic radiation is focused onto said small spot and such that said computer also simultaneously operates said digital light processor (DLP) to direct said at least one wavelength, after focusing by the third focuser (F3) into said detector (DET), while diverting other wavelengths away from said detector (DET).