发明名称 REAR SURFACE-PROTECTIVE FILM FOR PROTECTING REAR SURFACE OF SEMICONDUCTOR ELEMENT, INTEGRATED FILM, FILM, METHOD FOR PRODUCING SEMICONDUCTOR DEVICE, AND METHOD FOR PRODUCING CHIP
摘要 Disclosed is a rear surface-protective film making it possible to watch, across this rear surface-protective film, a crack of a semiconductor element through an infrared camera, and the like. is the invention relates to a rear surface-protective film for protecting a rear surface of a semiconductor element, the film having a parallel light transmittance of 15% or more at a wavelength of 800 nm. The ratio of the parallel light transmittance at a wavelength of 800 nm to the parallel light transmittance at a wavelength of 532 nm in the rear surface-protective film is preferably 2 or more.
申请公布号 US2016322252(A1) 申请公布日期 2016.11.03
申请号 US201615141336 申请日期 2016.04.28
申请人 NITTO DENKO CORPORATION 发明人 TAKAMOTO Naohide;KIMURA Ryuichi
分类号 H01L21/683;H01L21/78;H01L23/31;H01L23/00 主分类号 H01L21/683
代理机构 代理人
主权项 1. A rear surface-protective film for protecting a rear surface of a semiconductor element, wherein the rear surface-protective film has a parallel light transmittance of 15% or more at a wavelength of 800 nm.
地址 Osaka JP