| 摘要 |
PROBLEM TO BE SOLVED: To shorten a settling time of mirror action while stability is secured. SOLUTION: A mirror device is equipped with a mirror 11 and a driving electrode 13. The mirror control apparatus 14 is provided with: a driving voltage value storing means that stores a driving voltage value outputted immediately before receiving a driving voltage command value; a coefficient sequence storing means that stores a prescribed coefficient sequence composed of a plurality of coefficients; a driving voltage signal stream forming means that forms a driving voltage signal stream composed of a plurality of driving voltage values, on the basis of the driving voltage command value Vref, the driving voltage value stored in the driving voltage value storing means, and the coefficient sequence stored in the coefficient sequence storing means; and a driving voltage signal stream output means that successively outputs to the driving electrode 13 each driving voltage value of the driving voltage signal stream formed by the driving voltage signal stream forming means. COPYRIGHT: (C)2007,JPO&INPIT
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