FLUID DEVICE UNIT STRUCTURE

摘要

A fluid device unit structure in which fluid devices are integrated and united to effectively reduce the footprint of the devices. In the structure, the fluid devices connected to each other through flow passages are parallelly integrated on a base member (10). The base member (10) having installation surfaces (11) on which pure water opening/closing valves (5) are placed has pure water circulation and supply lines (2) passing through the base member (10) and parallelly connected with the pure water opening/closing valves (5) via pure water branch passages (4).