发明名称 Methods for Selective Placement of Dislocation Arrays
摘要 Misfit dislocations are selectively placed in layers formed over substrates. Thicknesses of layers may be used to define distances between misfit dislocations and surfaces of layers formed over substrates, as well as placement of misfit dislocations and dislocation arrays with respect to devices subsequently formed on the layers.
申请公布号 US2008070397(A1) 申请公布日期 2008.03.20
申请号 US20070945130 申请日期 2007.11.26
申请人 AMBERWAVE SYSTEMS CORPORATION 发明人 LOCHTEFELD ANTHONY J.;LEITZ CHRISTOPHER W.;CURRIE MATTHEW T.;BULSARA MAYANK
分类号 H01L21/44;C30B25/18;H01L21/20;H01L21/336;H01L21/762;H01L21/8238;H01L29/10;H01L29/78 主分类号 H01L21/44
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